Definitely sourcemeter territory, the newer Keithley 2450 has a 500nV source resolution, but the noise figure is big for that setting level. Also that's only on the lowest range which tops out at 20mV.
Are you sure you need nV accuracy in the source? It's easy to get a meter with that kind of resolution, but getting a constant voltage source of that caliber is tricky. Easier to do a precision current source (the same Keithley meter mentioned earlier can set currents with a 500fA resolution, 10^6 times finer steps).