The "Open & Short Cals" must include the traces and DUT pads to be accurate.
For example, the 1, 10, 100pF must have an accurate "Open Cal" to remove all the parasitic trace & pad capacitance to accurately resolve the actual DUT capacitance.
For low value resistors like 1, 10, 100 ohms, these require an accurate "Short Cal" to remove the parasite trace and pad resistance, same for low valued inductances like 10, 100, 1000nH.
The "Split Kelvin Holes" are for the low R, L & high valued Cs, maybe consider going to 100 ohms, 1uH, and above 10nF.
No need for the "Split Kelvin Holes" for the low valued Cs (use 2 Kelvin Hole Open Cal here), you want this for the high value Cs where ESR and ESL are important, like above 10nF.
Move the Kelvin Holes closer to the DUT on the Non-Split Kelvin fixtures since the traces are not compensated, keep traces as short as possible.
Since you have plenty of space, maybe locate Open and Short Cal near the high and low Impedance valued components on each side by R, L, and Cs.
Also, why the small thru holes on the Kelvin Clip Thur Hole tops? Those were for the terminals if used.
Avoid thru holes if possible, they add unwanted additional resistance and inductance to the fixture parasitics.
For low Z components try and "carry" the Kelvin connections right to the DUT Pad with low trace resistance for the Force trace, Sense trace shouldn't matter, then for the high Z components "carry" a single short length trace from the Kelvin Thru Hole to the DUT Pad and minimize parasitic capacitance.
Best,