I have LCR meter DER EE DE-5000, but I am not sure about precision of ESR measuring.
I measured several different types of capacitors, with all available frequencies, and measurements at 100Hz are very suspicious.
Are they OK, or the results are not really trustworthy?
Here are some mesurements:
10uF 16V 20% ceramic SMD 0805
7.50ohm @100Hz
0.44ohm @1kHz
0.02ohm @10kHz
0.02ohm @100kHz
10uF ceramic SMD 0805 another brand
8.30ohm @100Hz
0.63ohm @1kHz
0.04ohm @10kHz
0.04ohm @100kHz
10uF 16V tantalum SMD 3216
2.30ohm @100Hz
1.00ohm @1kHz
0.87ohm @10kHz
0.67ohm @100kHz
1uF 100V, 85C, electrolytic, RM2.5
23.70ohm @100Hz
7.13ohm @1kHz
3.71ohm @10kHz
2.95ohm @100kHz
10uF 100V, 85C, electrolytic
3.00ohm @100Hz
0.99ohm @1kHz
0.58ohm @10kHz
0.51ohm @100kHz
33uF 16V, 105C, electrolytic
4.40ohm @100Hz
1.95ohm @1kHz
1.43ohm @10kHz
1.13ohm @100kHz
680uF 25V, 105C, electrolytic
0.10ohm @100Hz
0.07ohm @1kHz