Don't know if we were lucky or what, but the DE-5000 we have with a good stable SMD test fixture as shown, produces results comparable to our Hioki IM3536 and Tonghui TH2830 LCR Lab Bench Meters. The SMD fixture shown is just a cheap AliX that we modded for better stability. We also took an extra TL-21 and removed the alligator clips and carefully replaced with 4 coaxial cables and female BNCs as shown for true Kelvin sensing.
For example, we ran thru our COG caps (0603 & 0805) from 0.3pF to 1000pF that we use to characterize and check the LCR meters before making serious measurements (sanity check if you will). We used 10KHz and 100KHz and compared the DE-5000 to the TH2830 (10 Avg) after doing an Open and Short cal on both with the fixture in place.
Value (size) TH2830 @ 10KHz (DE-5000) TH2830 @ 100KHz (DE-5000)
0.3pF (0805) 0.31678 (0.31) 0.31614 (0.32)
1pF (0805) 1.01954 (1.02) 1.01657 (1.02)
4.7pF (0603) 4.68814 (4.69) 4.68440 (4.71)
10pF (0805) 9.95328 (9.96) 9.94757 (10.01)
100pF (0805) 99.6967 (99.94) 99.6819 (99.97)
1000pF (0805) 993.241 (995.4) 992.724 (994.6)
Think these results speak for themselves, and better than we expected from a modestly priced handheld LCR meter, however YMMY.
Best and Happy Holidays,