I managed to find my old logic gate boards. These have HCT and AC gates and I drive them from an old Datapulse pulse generator. By passing the pulse through several gates, it does achieve a reasonably fast rise time at the output. According to the 4104 scope, the rise time is about 600ps. The original goal for these boards was to try and find the source impedance of the gates, or at least to find the optimal series resistor to put at the output when driving 50R coax.
The plot below shows a straight 50R measurement via a series matching resistor and some 50R coax into the 50R input of the 4104.
The channel 2 trace is my old Zo probe. This probe has lots of bandwidth, probably flat to about 3GHz. It's a 30dB probe that I normally use with a VNA or a spectrum analyser.
You can see that the probe did OK here. It does add a few artefacts to the pulse shape, but I'm not sure what to expect from this setup in terms of the 'perfect' pulse shape.
It really is quite important to have a scope with a low VSWR over a huge bandwidth in order to get a result like this when using a Zo probe. In the past, I've used an attenuator at the scope input with the 500MHz Infinium scope. The plot below is with the Zo probe directly fed into the 50R input of the Tek 4104.