thanks for your reply
This is first time I repair frequency counter ,. I have no exp with this device before
after few day. I found C60 C61 with voltage changing from ~2 to 5V seem normal because the frequency same with two blinking status leds (channel 1&2). and U42 and U48 working properly. my 53131a serial above MY470000. so I can't use old service manuals from agilent
btw I use a Printer ON via RS232 to see more details about this error and I have 4 line:
-Interpolator : A , MRC mode Fail
-Interpolator : B , MRC mode Fail
-Interpolator : B , CC mode Fail
-QSPI : HEX DAC Fail