I have tried using the spring method for scope probing, but I didn't seen any difference on the power lines. I use only X7R/X5R ceramic caps. There is a 1210 47 uF at the buck outlet and then 4.7uF 0805 at every LDO input and output (the 5V output one was after the ferrite, which is now shorted, there is also one at the 3.3V input). Beside every component there is a 100n 0805 + at some components also a 4.7uF 0805 one.
The PCB is double sided, with the back side almost a complete gnd plane, with just a few short traces stiched on the front side. Also there is a lot of ground pour on the front side with quite a few vias to back.
The idea of ferrites was to filter out switching spikes, not the switching frequency, which the LDO can handle quite well. According to LTspice simulation (with taking into account DC bias of caps and cables from lab power, but just a constant current load) I should be getting ~300 uV RMS, which is much less than I need. Comparing scope and spice the wave forms are identical from DC input to the buck input at each component. A bit more peak to peak in the buck output, but still identical wave form. Still not very much different at the 5V LDO input, but then then at the LDO output completeley different. Unfortunately I didn't compare/measure before I put all the components on.
I have used the buck, one sensor and one ADC before and I have gotten ~15 bits from the sensor from 19-23 bits from the ADC with shorted sensor outputs. Now I only get less than 12 bits from the sensor and less than 15 bits from the ADC.
I know I need to add filters or even a new LDO, but I would like to find out where. All the sensors need stable VCC, I don't want to put separate LDO's/filters for all of them, just the one causing the noise.