Your images are excellent, beautifully done and illuminated. I use a different technique and equipment to achieve a more 3D look. Illumination is from multiple flashes highly diffused.
You can see some older work that I can show here on Nikon Image Space, download for the higher resolutions.
http://img.gg/taIZ99MI use a lens configuration based upon a microscope objective, infinity corrected, with a 200mm FL tube lens which attaches to a DSLR (Nikon D500, D800E or D850, and soon a Z7). This mounts to a custom developed focus stacking rig I just posted a listed here on the development of this setup. This allows extreme macro levels of resolution, but coverage of a larger field of view with a stacking and stitching technique. Images of 29,000 by 22,000 pixels have been achieved with this setup, soon this will surpass 40,000 by 30,000 pixels which maybe I'll be able to show in a few years.
This was all started way back in ~2004 to image the chips we had and were developing, many of the images I can show are from older designs that I was involved with and many are or contain patented circuits.
I've attached some old images of the lenses and one of the vertical setups, we use both V and H setups and also an lab grade Thorlabs setup (last image). Things are more evolved now, but were the images I have on hand.
BTW we've now developed techniques to allow sub-micron stacking, and lately utilizing Piezo Electric Device Stages for approaching under 50 nanometer levels.
Best