If the layout is correct, chip resistors are good into the 5-10GHz+ range. And whatever fractional nanoseconds that corresponds to. Mind that low values will tend to look inductive (physically, they look more like transmission line than terminating resistor), and high values, capacitive (same reason, opposite direction).
Obviously, something as high as a 1M resistor ain't gonna be 1M impedance at 10GHz, not when the footprint pads themselves have lower capacitive reactance between them through the substrate alone.
Tim