There is not that much new developement for the high resolution meters. The last one is the Fluke 8858, with not that much details known, but this may still be just a slightly bigger iteration on the old ADC from the Datron 1271/1281. The updated 3458 version is still very close to the old one, mainly replacing some obsolete parts (especially the comparators) but otherwise very close to the original.
The Keithley 7510 still looks like a decendent of the K2000/K2002 , though I only saw pictures of the PCB.
For the more standard meters (3446x) Keysight uses it's multislope 4 ADC, that is more like a contineous time sigma delta ADC. This is not ideal for highest linearity, but it helps with good performance at high speed (AFAIK some 500 kSPS) that is used for the digital AC RMS mode. The sigma delta part uses oversampling to some degree, though not as much as more classic higher order ones.
For the jitter ~1 ps is easy, lower gets tricky with more unusual logic chips and also the CMOS swiches may not be much better than this. This level is still good enough, at least when the modulation frequency is not very high. There are still a few point's where one could learn from the time nuts and the timing measurements, but a TDC makes relatively little sense. It is a thing about making sure that the delays and clocks are not effected by the comparator or similar. Unintendent modulations in the frequency or delays can cause INL and this is the more tricky part than the more minor noise contribution from jitter.