Could you provide some details on how the resistances were measured? Methodology, equipment? Was it simply using the resistance range of an instrument, or was it a potential divider technique from a known voltage? Or Hamon divider? This whole thing has made me think hard about resistance measurements.
It is complicated. I used several different ways for measuring the resistance and cross-checking the results. For the TC curves above I've used the Keithley 263 as a current source and HIOKI DM7275 as a voltmeter and a thermometer, with the voltage across the measured resistor about 10V (so thermal voltage effects are reasonably benign). This way I have the best resolution as long as the current is stable, so it is a good way to see and measure temperature coefficients, however the absolute accuracy is relatively poor as the accuracy of the K263 current is limited. It is good enough for 100M resistors and above though and I've used it to cross-check absolute measured values. The Keithley 263 has a separate voltage monitoring output from the internal electrometer amplifier, so the load resistance can be measured this way (and that is how HIOKI is connected to measure TC).
The K263 also has a set of reference resistors in nine decades from 1K to 100G, with the values from 100M and above calculated from lower (directly measured) values, step by step using the "ladder" method during the calibration routine (and it needs only an accurate DC voltmeter to do it). So the second method I use to measure 100M and above is a direct measurement by the Keithley 617 electrometer in I/V mode, with 10V across the DUT, after calibrating the 617 from the values of the 263. For examle, I would like to measure 1G as accurately as possible using the value stored in the K263 as the reference. First I measure the reference 1G resistor in K263 using K617. The value displayed on K263 is 0.99945 Gohm and the 617 shows 0.9999 Gohm so roughly 0.5M high. The error is recorded and subtracted from the measurement of the unknown resistor, for example for my reference 7D unit s/n 240800 the K617 shows 0.9975 Gohm and I record the measured value as 0.997 G.
For the lower resistances I have a better reference - the Fluke 742-10k with the measured value 10.00005 K and I use my HP3456A meter to measure the 10K resistance directly (4W, O.C.) after it was calibrated using the Fluke, so the error is smallest this way, despite "only" 6.5 digit resolution of the 3456A . The 100K section is also measured the same way but the HP 3456A is calibrated using a Hamon transfer with SR1010 10K for 100K range and further up to 1M using SR1010 100K. 1M and 10M are measured in 2W mode directly by the HP3456A and I use a self-build Hamon 1M set to calibrate the 10M range. I also double-check the values on the next range up for each measurement, and though it only gives 10ppm resolution it is a good sanity check to see that nothing is amiss.
Cheers
Alex
P.S. - I also measure and select all resistors before I build the array, and use copper clips to reduce the impact of soldering during the assembly. To measure resistors over 10M I use a separate enclosure for shielding.