Wouldn't all kinds of clamping pressure affect the resistance as well?
That's a good question and one we had awhile back wrt to measuring SMD very low impedance values. The LCR fixtures and tweezers we have all suffer form the variations in applied pressure, including the "Zero" ohm calibration.
When we set out to develop the "Plunger" type SMD fixture shown (see above link), one of the goals was to achieve better repeatability than what we had seen with the LCR SMD fixture and tweezers (even the better Tonghui ones mentioned) with low Z DUTs.
This is still an ongoing developement, but highly encouraging results have been achieved. We've been able to measure quality low impedance (milliohm levels) with very good repeatability, even into the sub-milliohm regions. The main reason for this level of repeatability is that the Force and Sense leads from the LCR meter aren't terminated at the fixture connection point like conventional fixtures, but the connection between Force and Sense is made with the DUT SMD end terminations. So in effect the DUT itself is making the connection between the Force and Sense which dramatically reduces the contact impedance, pressure, surface, and orientation sensitivity of the fixture to the DUT.
Still need to perform more work and get gold plated PCBs, will provide more details if folks are interested.
Best,